When I interned at Microsoft (in 1995, just before Windows 95 was released), they paid to fly me out + ship a bunch of boxes + taxi to/from the airport.
There were subsidized, furnished apartments right across the street. I think it was $400/mo with a roommate, $500/mo solo.
I think you could rent a car at a discount. You also got 7 days of car rental for free. Some people got together and shared a rental car, each person contributing their 7 days at first, then sharing the costs after that.
I think there were health benefits, but I don't remember for sure. I seem to remember you could participate in the Employee Stock Purchase Program, buying MSFT at a discount, but again, I'm not sure.
I don't remember what it paid, but it was a lot more than the small, local software shops near my home, and not as much as some of the companies that were extravagant with their internship offers. (Joel makes a good case for using internships to make great hires, so those companies may have been doing the right thing.)
At the time, Microsoft had about 400 interns at a time.