The main question is whether you are seeking a terminal masters (to go back to the industry for engineering/management) or for research MS/PHD.
If we're talking terminal, Carnegie Mellon has multiple programs in IT/MS, the most prestigious one is probably the masters of software engineering, though they have some programs related to network security, ebusiness, etc.
I'm doing a PhD in software engineering at CMU, but our program is relatively small. Most computer science programs have people doing software engineering research. You really have to find a topic you're interested in (e.g., read program descriptions for conferences like ICSE) and then see who publishes on these topics and apply accordingly.
The ranking of your program is only one part of the story, it's more important to be in a field and with a professor you can work with and do great work with.